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Vol.27, No.2, 141 ~ 147, 1989
Title
Slider LPE Growth of Hg0.3Cd0.7Te
김진상J . S . Kim, 류한일H . I . Yoo, 서상희S . H . Suh
Abstract
Hg_(0.3)Cd_(0.7)Te epi layers were grown by a slider liquid phase epitaxial growth process with using ramp cooling. A new slider boat was designed to keep the composition of the Te-rech growth solution from changing during growth. It was possible to grow Hg_(0.3)Cd_(0.7)Te epi layers with uniform composition in the thickness direction. The temperature at which CdTe substrate is contacted with the growth solution should be 1∼2℃ higher than the liquidus temperature in order to obtain the surface morphology with uniform terraces.
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