발간논문

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Vol.35, No.11, 1468 ~ 1477, 1997
Title
Elastic Modulus Measurement of Thin Film using a Dynamic Method
김영만 , 조기현 Young Man Kim , Ki Hyun Cho
Abstract
A two layer composite model was developed using a beam vibration theory and the model was applied for measuring the Young`s modulus of thin film. The Ti coated Si wafer composites were produced by RF magnetron sputtering and used to test the developed model. The measured film moduli using the combination of the developed two layer composite model and the sonic resonance method were checked with those using the static method utilizing the bending of cantilever composite beam. The film modulus values measured in both methods were in good agreements. The film modulus values for the specimens with different film thicknesses were also in good agreements when they were measured in the same method.
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