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Vol.40, No.3, 333 ~ 340, 2002
Title
Research Papers / Electronic , Magnetic & Optical materials : Thermoelectric Properties of p-type (Bi1-xSbx)2Te3 Thin Films with Annealing in Hydrogen Ambient
이광용Kwang Yong Lee,현도빈Dow Bin Hyun,오태성Tae Sung Oh
Abstract
(Bi_(1-x)Sb_x)_2Te_3 thermoelectric thin films were prepared by DC magnetron sputtering process, and their thermoelectric characteristics were investigated with the Sb_2Te_3 content and annealing process in hydrogen atmosphere. With annealing in hydrogen atmosphere, the compositions of (Bi(1-x)Sb_x)_2Te_3 thin films were changed to be Bi-surplus and Te-deficient. Seebeck coefficient and electrical resistivity of (Bi(1-x)Sb_x)_2Te_3 thin films decreased with annealing due to increase of hole concentration. Power factor of (Bi(1-x)Sb_x)_2Te_3 films increased with increasing the Sb_2Te_3 content, and was improved about two times with annealing in hydrogen atmosphere. As-annealed (Bi_0.15Sb_0.85)_2Te_3 film exhibited a maximum power factor of 0.64×10 exp (-3) W/K^2 -m.
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