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Vol.41, No.8, 473 ~ 479, 2003
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| Title |
| High Temperature Oxidation of TiN, TiCN and CrN Thin Films |
| 백창현 Baeg Chang Hyeon , 홍주화 Hong Ju Hwa , 위명용 Wi Myeong Yong , 김기영 Kim Gi Yeong , 이동복 Lee Dong Bog |
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| Abstract |
| The oxidation behavior of TiN, TiCN and CrN coatings sputtered on a steel substrate was investigated at 850℃ in air. Both TiN and TiCN oxidized to Tio₂ while CrN oxidzed to Cr₂O₃. The oxidation resistance decreased in the order of CrN, TiN and TiCN. During oxidation, the outward diffusion of substrate elements such as Fe, Si occurred to a certain degree. The enrichment of substrate element of Cr at the oxide scale and the depletion of nitrogen at the lower part of the unoxidized CrN coating were observed. |
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| Key Words |
| Oxidations behavior, TiN, TiCN, CrN |
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