발간논문

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Vol.36, No.10, 1678 ~ 1686, 1998
Title
A Study on the Fabrication Technology and Magnetic Characteristics of FeTaN Films Inductor at High Frequency
이창호 , 신동훈 , 남승의 , 김형준 Chang Ho Lee , Dong Hoon Shin , Seoung Eui Nam , Hyoung June Kim
Abstract
The purposes of this research were to develop the magnetic thin films using for high frequency range and to establish the processing technique of a meander type micro-coil in order to produce the micro magnetic device(MMD) and analyze its electrical characteristics. As magnetic thin films, we used Fe_(78.8)Ta_(8.5)N_(12.7) films which had nano-crystalline structure produced by a DC magnetron reactive sputtering system, magnetic properties were like these : Bs=15∼16 kG. Hc=0.12∼0.17 Oe, μ`=2800∼4000. The Cu coil produced by selective electro-plating(SEP) showed the resistivity of 2 μΩ-㎝. In case of the meander type magnetic thin films inductor with 5 turns, an inductance of 229 nH which is about 4 times higher than that of air core inductor was shown, and a resonance frequency of 37 MHz and a quality factor of 1.8 at 10 MHz were also shown.
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