발간논문

Home > KJMM 논문 > 발간논문

Vol.37, No.3, 328 ~ 334, 1999
Title
Research Paper / Electronic Magnetic & Optical Materials : Effects of Ar pressure on the Quality of Film made by Evaporation
최상준Sang Joon Choi, 홍재화Jae Hwa Hong, 권순주Soon Joo Kwon
Abstract
Generally, the density of films deposited by evaporation techniques are lower than sputtering, due to the lower kinetic energy of the evaporated atoms (or ions). The authors report an enhancement of the kinetic energy by increasing the chamber pressure with an inert gas (e.g., Ar). The validity of the idea has been proved with permalloy(NiN_(80)Fe_(20))/Cu multilayer films, of which the quality was characterized using synchrotron X-ray and atomic force microscopy.
Key Words
| PDF
대한금속∙재료학회 │ (06633) 서울시 서초구 서초대로 56길 38 대한금속∙재료학회 회관 (서초1동 1666-12번지)
Tel : 070-4266-1646 │ FAX : 02-557-1080 │ E-mail : metal@kim.or.kr
Copyright ⓒ 2013 사단법인 대한금속∙재료학회 All rights reserved.