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Vol.46, No.11, 747 ~ 755, 2008
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| Title |
| The Effect of Various Electrolyte Concentrations on Surface and Electrical Characteristic of the Copper Deposition Layer at Anodizing of Titanium Anode |
| 이만형 Man Hyung Lee , 박은광 Eun Kwang Park , 우태규 Tae Gyu Woo , 박일송 Il Song Park , 윤영민 Young Min Yoon , 설경원 Kyeong Won Seol |
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| Abstract |
| Recently, the requirement for the ultra thin copper foil increases with smaller and miniaturized electronic components. Therefore, it is important to examine the surface state of substrate depending on the processing parameter during the anodic oxidation. This study investigated the effect of the various electrolyte concentrations on anodizing of titanium anode prior to copper electrodeposition. Different surface morphology of anodized titanium was obtained at different electrolytic concentration 0.5 M to 3.0 M. In addition, the effect that the surfaces and the electrical characteristics on the electrodeposited copper layer was observed. In this study, surface anodized in the group containing 0.5M H2SO4 shows more uniform copper crystals with low surface roughness. the surface roughness and sheet resistance for 0.5M H2SO4 group were 1.353 μm and 0.104 mΩ/sq, respectively. |
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| Key Words |
| electrodeposition, anodic oxidation, sheet resistance, spark discharge |
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