발간논문

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Vol.48, No.2, 169 ~ 175, 2010
Title
Formaldehyde Gas-Sensing Characteristics of SnO2-ZnO Materials
윤진호 Jin Ho Yoon , 이회중 Hoi Jung Lee , 김정식 Jung Sik Kim
Abstract
A micro gas sensor for formaldehyde (HCHO) gas was fabricated by using MEMS (Micro Electro Mechanical System) technology and the sol-gel process. The sensing materials of the SnO2-ZnO system were synthesized by the sol-gel method. The crystal structure and thermal analysis of the SnO2-ZnO were characterized by XRD and DSC-TGA. The fabricated gas sensors were tested at various gas concentrations (0.5~5.0 ppm) and different operation temperatures (350~550℃). The SnO2-10 mol%ZnO sensor showed the highest sensitivity (Rs=0.24) for 1.0 ppm-formaldehyde at 500℃ and response time (90% saturation time) was within 20 seconds.
Key Words
formaldehyde sensor, nanostructured materials, sol-gel, electrical properties, electrical conductivity/resistivity
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