|
Vol.56, No.12, 910 ~ 915, 2018
|
| Title |
| Pattern Formation of Highly Ordered Sub-20 nm Pt Cross-Bar on Ni Thin Film |
| 박태완 Tae Wan Park , 정현성 Hyunsung Jung , 조영래 Young-rae Cho , 이정우 Jung Woo Lee , 박운익 Woon Ik Park |
|
|
|
| Abstract |
| Since catalyst technology is one of the promising technologies to improve the working performance of next generation energy and electronic devices, many efforts have been made to develop various catalysts with high efficiency at a low cost. However, there are remaining challenges to be resolved in order to use the suggested catalytic materials, such as platinum (Pt), gold (Au), and palladium (Pd), due to their poor costeffectiveness for device applications. In this study, to overcome these challenges, we suggest a useful method to increase the surface area of a noble metal catalyst material, resulting in a reduction of the total amount of catalyst usage. By employing block copolymer (BCP) self-assembly and nano-transfer printing (n-TP) processes, we successfully fabricated sub-20 nm Pt line and cross-bar patterns. Furthermore, we obtained a highly ordered Pt cross-bar pattern on a Ni thin film and a Pt-embedded Ni thin film, which can be used as hetero hybrid alloy catalyst structure. For a detailed analysis of the hybrid catalytic material, we used scanning electron microscope (SEM), transmission electron microscope (TEM) and energy-dispersive X-ray spectroscopy (EDS), which revealed a well-defined nanoporous Pt nanostructure on the Ni thin film. Based on these results, we expect that the successful hybridization of various catalytic nanostructures can be extended to other material systems and devices in the near future.
(Received October 22, 2018; Accepted November 9, 2018) |
|
|
| Key Words |
| nanostructured materials, nano-transfer printing, catalyst, cross-bar nanostructure, nanostructural analysis |
|
|
 |
|
